Turnkey Ultra Pure
Systems for Fab-Ready Infrastructure
End-to-end solutions that ensure purity, reliability, safety, and efficiency for semiconductor and photovoltaic manufacturing.
01
UHP Gas Delivery Systems
- Bulk gas systems
- Specialty gas systems
- Gas cabinets/ Racks
- VMB/ VDB/ VMP
- Gas Regulators
- Gas chromotograph
- Scrubbers
02
UHP Chemical Delivery Systems
- CDM (Chemical Delivery Module)
- CCB (Chemical Cabinet Box)
- T-Box
- Chemical blending systems
- Chemical dispensing
- Waste liquid handling
- Chemical safety systems
03
Wafer Tool Gas Box Integration
- OEM tool integration
- Lam/ AMAT/ ASM/ TEL compatibility
- Tool hook-up
- EP stainless steel piping
- Orbital welding
- Facility-to-tool interface
04
Monitoring & Automation
- GMS (Gas Monitoring System)
- CMS (Chemical Monitoring System)
- GIS (Gas Information System)
- Alarm & interlock systems
- Flow monitoring
- Purity monitoring
- SCADA integration
- MES Compatibility
05
Environmental & Safety Systems
- Exhaust Scrubbers
- Tail-gas recovery systems
- Environmental monitoring
- Safety interlocks
- Waste gas neutralization
- Emergency response scystems
06
Engineering & Integration
- 3D CAD/ BIM design
- SEMI/ ISO documentation
- EP stainless steel piping
- Orbital welding
- OEM tool alignment
- Commissioning & start-up
- QA/ QC & compliance systems
Manufacturing & Assembly
- Cleanroom manufacturing (Class 100 – 10,000)
- CNC precision cutting & fabrication
- Orbital welding & precision assembly
- Leak testing
- Pressure testing
- Purify testing
- Traceability & documentation
- Modular system assembly
- Quality assurance before delivery
Lifecycle Services
